Electronics Cleanroom Fresh-Air Total Heat Recovery for Energy Saving

Project Background

Semiconductor-packaging cleanrooms have stringent temperature and humidity requirements and a large fresh-air demand.

Challenges

Fresh-air dehumidification and cooling dominate HVAC energy, and load swings hurt yield.

Solution

AdoptHeat-recovery fresh-air unit (rotary total-heat wheel)pre-treats the fresh air and is integrated withRotary Heat Exchangerto recover exhaust energy in coordination.

Results

AHU dehumidification load reduced by 30%, with more stable indoor temperature/humidity and improved process yield.