Electronics Cleanroom Fresh-Air Total Heat Recovery for Energy Saving

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Project Background

Semiconductor-packaging cleanrooms have stringent temperature and humidity requirements and a large fresh-air demand.

Challenges

Fresh-air dehumidification and cooling dominate HVAC energy, and load swings hurt yield.

Solution

AdoptHeat-recovery fresh-air unit (rotary total-heat wheel)pre-treats the fresh air and is integrated withRotary Heat Exchangerto recover exhaust energy in coordination.

Results

AHU dehumidification load reduced by 30%, with more stable indoor temperature/humidity and improved process yield.

电子洁净厂房全热回收

电子洁净厂房换气次数极高，新风负荷占空调能耗大头。全热回收在引入新风时同步回收温度与湿度，可显著削减冷热源与加湿负荷。配合多级过滤与压差控制，兼顾节能与洁净度要求。

过滤与压差

电子洁净对微粒控制极严，热回收段应合理配置高效过滤，确保送风洁净度不受影响，并维持房间压差梯度。

过滤与压差

电子洁净对微粒控制极严，热回收段应合理配置高效过滤，确保送风洁净度不受影响，并维持房间压差梯度，满足工艺对环境的高标准要求。

洁净厂房改造应同步校核空调箱余压与过滤阻力，避免连锁影响；任何新增段都应在系统风量平衡范围内设计。

任何新增段都应在系统风量平衡范围内设计，改造后重新校核空调箱余压与过滤阻力，确保送风洁净度与房间压差梯度不被破坏，维持工艺环境稳定。